Fabrication of matrix-addressable InGaN-based microdisplays of high array density

IEEE Photonics Technology Letters

Volumn 15, Issue 11, 2003, Pages 1516-1518

  Jeon, C W ^a   Choi, H W ^a   Dawson, M D ^a  

^a UNIVERSITY OF STRATHCLYDE   (United Kingdom)

Author keywords

GaN; Microdisplays; Microlight emitting diodes (micro LEDs)

Indexed keywords

CHEMICAL MECHANICAL POLISHING; GALLIUM NITRIDE; METALLIZING; MICROELECTROMECHANICAL DEVICES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR QUANTUM WELLS; SILICA;

INDIUM GALLIUM NITRIDE; MICRODISPLAYS; MICROLIGHT-EMITTING DIODES;

LIGHT EMITTING DIODES;

EID: 0242270865     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2003.818643     Document Type: Article

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