Imprint lithography for flexible transparent plastic substrates

Microelectronic Engineering

Volumn 75, Issue 2, 2004, Pages 145-148

  Liao, Wen Chang ^a   Hsu, Steve Lien Chung ^a   Chu, Sheng Yuan ^a   Kau, Po Ching ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Flexible plastic substrate; Imprint lithography; PMMA

Indexed keywords

DEFORMATION; HEATING; LITHOGRAPHY; PHOTOPOLYMERIZATION; POLYMETHYL METHACRYLATES; SPIN COATING;

FLEXIBLE PLASTIC SUBSTRATE; IMPRINT LITHOGRAPHY; POLYMER RESISTS; RESIST LAYERS;

PLASTIC PRODUCTS;

EID: 3142714665     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2004.03.084     Document Type: Article

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