Construction of nonlinear dynamic MEMS component models using Cosserat theory

DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003

Volumn , Issue , 2003, Pages 131-136

  Wang, C ^a   Liu, D ^a   Rosing, R ^a   De Masi, B ^b   Richardson, A ^a  

^a LANCASTER UNIVERSITY   (United Kingdom)

^b STMICROELECTRONICS   (Italy)

Author keywords

Finite element methods; Gravity; Mathematical model; Mathematics; Micromechanical devices; Nonlinear dynamical systems; Numerical simulation; Predictive models; Stress; System performance

Indexed keywords

EID: 3142693469     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DTIP.2003.1287023     Document Type: Conference Paper

References (8)

1. G.Lorenz and R. Neul, "Network-Type Modeling of Micromachined Sensor Systems", Proc. of the MSM, pp. 233-238, April 1998, Santa Clara.
2. T. Mukherjee, G.K. Fedder and R.D. Blanton, "Hierarchical Design and Test of Integrated Microsystems", IEEE Design and Test of Computers, 16 (4) pp. 18-27, 1999.
3. CoventorWare of Coventor Inc. http://www.coventor.com.
4. MEMSMaster of MEMSCAP, http://www.memscap.com.
5. B Librovich, R W Tucker and C Wang, "On Gear Modelling in Multistage Rotary Vane Engines" To appear in Meccanica, 2003.
6. R.W. Tucker and C. Wang, "Torsional Vibration Control and Cosserat Dynamics of a Drill-Rig Assembly" Meccanica 38 pp. 143-159, 2003.
7. A. Balanov, N. Janson, P.V.E. McClintock, R.W. Tucker and C. Wang, "Bifurcation analysis of a neutral delay differential equation modelling the torsional motion of a driven drill string", Chaos, Solitons and Fractals 15 pp. 381-394, 2003.
8. R. Rosing, C. Wang, R. Tucker, A. Richardson, B. De Masi, "Generation of MEMS component models using Cosserat symbolic simulations", Proc. of SPIE DTIP symposium, Cannes Mandelieu, France, May 5-8, 2002, pp. 149-154.