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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 3, 2004, Pages 870-873

Excimer laser annealing of p-type perovskite thin films

(5) Du, X a Dubowski, J J b Post, M a Wang, D a Tunney, J a

a NATIONAL RESEARCH COUNCIL CANADA (Canada)

b UNIVERSITÉ DE SHERBROOKE (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CMOS INTEGRATED CIRCUITS; CRYSTAL STRUCTURE; CRYSTALLIZATION; DEPOSITION; EXCIMER LASERS; LASER PULSES; MICROSTRUCTURE; MORPHOLOGY; PEROVSKITE; SAPPHIRE; SINGLE CRYSTALS; STRONTIUM COMPOUNDS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

CRYSTALLINE FILMS; EXCIMER LASER ANNEALING; FILM CRYSTALLINITY;

AMORPHOUS FILMS;

EID: 3142694251 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1651545 Document Type: Conference Paper

Times cited : (4)

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