How non-destructive is ISS?

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 222, Issue 3-4, 2004, Pages 609-618

  Teodoro, O M N D ^a   Moutinho, A M C ^a  

^a UNIVERSIDADE NOVA DE LISBOA   (Portugal)

Author keywords

Atom emission; Atom solid interactions; ISS; Sputtering

Indexed keywords

ADSORPTION; ANISOTROPY; ATOMIC BEAMS; ELECTROMAGNETIC WAVE EMISSION; MASS SPECTROMETRY; SPUTTERING;

ATOM-SOLID INTERACTIONS; GRAZING ANGLES; ION SCATTERING SPECTROSCOPY (ISS); SECONDARY ION MASS SPECTROMETRY (SIMS);

ELECTROMAGNETIC WAVE SCATTERING;

EID: 3142688224     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.04.162     Document Type: Article

References (20)

1. Bertrand P.G., Rabalais J.W. Rabalais J.W. Low Energy Ion-Surface Interactions. 1994;55 Wiley, New York.
2. Taglauer E. Appl. Phys. A. 51:1990;238.
3. Niehus H., Heiland W., Taglauer E. Surf. Sci. Rep. 17:1993;213.
4. Rabalais J.W. Principles and Applications of Ion Scattering Spectrometry: Surface Chemical and Structural Analysis. 2002;Wiley, New York.
5. Teodoro O.M.N.D., Silva J.A.M.C., Moutinho A.M.C. Vacuum. 46:1995;1205.
6. Teodoro O.M.N.D., Moutinho A.M.C. Surf. Sci. 482:2001;1392.
7. W. Eckstein, C. García-Rosales, J. Roth, W. Ottenberger, IPP 9/82 Max. Planck-Institut Fur Plasmaphysik, Munique, 1993.
8. Gnaser H. Springer Tracts in Modern Physics. 146:1999;Springer, Berlin.
9. Eckstein W., Carcia-Rosales C., Roth J., László J. Nucl. Instr. and Meth. B. 83:1993;95.
10. Yamamura Y., Bohdansky J. Vacuum. 35:1985;561.
11. Yamamura Y. Nucl. Instr. and Meth. B. 2:1984;578.
12. Teodoro O.M.N.D., Moutinho A.M.C. Vaccum. 64:2002;431 O.M.N.D. Teodoro, Ph.D. Thesis, New University of Lisbon, 1998.
13. Teodoro O.M.N.D., Moutinho A.M.C. Vaccum. 64:2002;431 O.M.N.D. Teodoro, Ph.D. Thesis, New University of Lisbon, 1998.
14. Bohdansky J. Nucl. Instr. and Meth. B. 2:1984;587.
15. Robinson M.T., Torrens I.M. Phys. Rev. B. 9:1974;5008.
16. Eckstein W. Springer Series in Materials Science. 10:1991;Springer, Berlin. p. 177.
17. Eckstein W., Preuss R. J. Nucl. Mater. 320:2003;209.
18. Eckstein W., Hou M. Nucl. Instr. and Meth. B. 53:1991;270.
19. Matsunami N., Yamamura Y., Itikawa Y., Itoh N., Kazumata Y., Miyagawa S., Morita K., Shimizu R., Tawara H. At. Data Nucl. Data Tables. 31:1984;1.
20. Canário A.R., Sanchez E.A., Bandurin Yu., Esaulov V.A. Surf. Sci. 547:2003;L887.