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Volumn 268, Issue 3-4 SPEC. ISS., 2004, Pages 359-363
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Silicon nitride and polyimide capping layers on InGaAs/InP PIN photodetector after sulfur treatment
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Author keywords
A1. Sulfur passivation; A1. Surface recombination; B1. Polyimide; B3. Photodetector
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Indexed keywords
CAPACITANCE;
CHEMICAL BONDS;
ELECTRIC CURRENTS;
PASSIVATION;
POLYIMIDES;
SEMICONDUCTING INDIUM GALLIUM ARSENIDE;
SEMICONDUCTING INDIUM PHOSPHIDE;
SENSITIVITY ANALYSIS;
SILICON NITRIDE;
SULFUR;
SULFUR PASSIVATION;
SURFACE RECOMBINATION;
PHOTODETECTORS;
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EID: 3142687597
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jcrysgro.2004.04.054 Document Type: Conference Paper |
Times cited : (24)
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References (15)
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