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Volumn 268, Issue 3-4 SPEC. ISS., 2004, Pages 359-363

Silicon nitride and polyimide capping layers on InGaAs/InP PIN photodetector after sulfur treatment

Author keywords

A1. Sulfur passivation; A1. Surface recombination; B1. Polyimide; B3. Photodetector

Indexed keywords

CAPACITANCE; CHEMICAL BONDS; ELECTRIC CURRENTS; PASSIVATION; POLYIMIDES; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; SEMICONDUCTING INDIUM PHOSPHIDE; SENSITIVITY ANALYSIS; SILICON NITRIDE; SULFUR;

EID: 3142687597     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2004.04.054     Document Type: Conference Paper
Times cited : (24)

References (15)
  • 8
    • 0037009285 scopus 로고    scopus 로고
    • Elsevier Amsterdam
    • G. Eftekhari, Vacuum, 67, Elsevier Amsterdam, 2002, p. 81.
    • (2002) Vacuum , vol.67 , pp. 81
    • Eftekhari, G.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.