Application of computer vision and laser interferometer to the inspection of line scale

Optics and Lasers in Engineering

Volumn 42, Issue 5, 2004, Pages 563-584

  Luo, P F ^a   Pan, S P ^b   Chu, T C ^a  

^a CHUNG HUA UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Laser interferometer; Line space measurement; Outlier excluding least squares regression; Subpixel edge localization; Vision inspection

Indexed keywords

CAMERAS; CHARGE COUPLED DEVICES; COORDINATE MEASURING MACHINES; HELIUM; INTERFEROMETERS; LASER APPLICATIONS; MIRRORS; NEON; REFLECTION; REGRESSION ANALYSIS;

LASER INTERFEROMETERS; OUTLIER-EXCLUDING LEAST-SQUARES REGRESSION; SUBPIXEL EDGE LOCALIZATION; VISION INSPECTION;

COMPUTER VISION;

EID: 3142577373     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2004.04.001     Document Type: Article

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