Investigation and modeling of plasma-wall interactions in inductively coupled fluorocarbon plasmas

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 3, 2004, Pages 689-697

  Joseph, E A ^a   Zhou, B ^a   Sant, S P ^a   Overzet, L J ^a   Goeckner, M J ^a  

^a UNIVERSITY OF TEXAS AT DALLAS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FEEDGAS CHEMISTRIES; HYBRID PLASMA EQUIPMENT MODEL (HPEM); MICROWAVE INTERFEROMETRY (MWI); PLASMA-WALL INTERACTIONS;

CARRIER CONCENTRATION; COMPUTATIONAL METHODS; DISSOCIATION; ELECTRIC FIELDS; FLUOROCARBONS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; IN SITU PROCESSING; INFRARED RADIATION; INTERFEROMETRY; LIGHT ABSORPTION; MATHEMATICAL MODELS; MICROWAVES; PLASMA DENSITY; PLASMA INTERACTIONS; VACUUM APPLICATIONS; VIBRATION CONTROL;

INDUCTIVELY COUPLED PLASMA;

EID: 3142547487     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1722614     Document Type: Article

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