Physical properties of nanostructures grown by oblique angle deposition

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 5, 2005, Pages 2114-2121

  Singh, J P ^a   Karabacak, T ^a   Ye, D X ^a   Liu, D L ^a   Picu, C ^b   Lu, T M ^a   Wang, G C ^a  

^a Rensselaer Polytechnic Institute   (United States)

^b RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FIELD EMISSION; SHADOWING EFFECT;

ARGON; ELECTRIC PROPERTIES; MECHANICAL PROPERTIES; PHYSICAL PROPERTIES; SCANNING TUNNELING MICROSCOPY; SILICON;

NANOSTRUCTURED MATERIALS;

EID: 31144461235     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2052747     Document Type: Article

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