High-rate and low-temperature synthesis of Ti O2, TiN, and Ti O2 TiNTi O2 thin films and study of their optical and interfacial characteristics

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 4, 2005, Pages 1826-1831

  Jung, Min Jae ^a   Lee, Ho Young ^a   Han, Jeon G ^a   Jung, Chung K ^a   Moon, Jong S ^a   Boo, Jin Hyo ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS; HIGH TEMPERATURE APPLICATIONS; OPTICAL PROPERTIES; REFLECTION; SPUTTERING; SYNTHESIS (CHEMICAL); THIN FILMS; TITANIUM DIOXIDE;

PULSED DC SPUTTERING; TRANSMITTANCE;

TITANIUM NITRIDE;

EID: 31144452392     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1978903     Document Type: Article

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