Monolithic modelling of electro-mechanical coupling in micro-structures

International Journal for Numerical Methods in Engineering

Volumn 65, Issue 4, 2006, Pages 461-493

  Rochus, V ^a   Rixen, D J ^b   Golinval, J C ^a  

^a UNIVERSITY OF LIÈGE   (Belgium)

^b FACULTY OF INDUSTRIAL DESIGN ENGINEERING   (Netherlands)

Author keywords

Electro mechanical coupling; Finite element method; Micro electromechanical systems; Monolithic schemes

Indexed keywords

COMPUTER SIMULATION; COUPLINGS; ELECTRIC FIELDS; GIBBS FREE ENERGY; MAGNETIC FIELDS; MATHEMATICAL MODELS; MATRIX ALGEBRA; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; NATURAL FREQUENCIES; STIFFNESS MATRIX;

CAPACITIVE EFFECT; ELECTRO-MECHANICAL COUPLING; MONOLITHIC MODELLING;

FINITE ELEMENT METHOD;

COMPUTER SIMULATION; COUPLINGS; ELECTRIC FIELDS; FINITE ELEMENT METHOD; GIBBS FREE ENERGY; MAGNETIC FIELDS; MATHEMATICAL MODELS; MATRIX ALGEBRA; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; NATURAL FREQUENCIES; STIFFNESS MATRIX;

EID: 31144446914     PISSN: 00295981     EISSN: 10970207     Source Type: Journal    
DOI: 10.1002/nme.1450     Document Type: Article

References (20)

1. Meys B. Modérlisation des champs électromagnétiques aux hyperfréquences par la méthode des éléments finis: application aux problèmes de chauffage diélectrique. Ph.D. Thesis, University of Liège, Belgium, 1999.
2. Osterberg PM, Senturia SD. M-test: a test chip for MEMs material property measurement using electrostatically actuated test structures. IEEE 1997; 6(2):107-118.
3. Ikeda T. Fundamentals of Piezoelectricity. Oxford Science Publications: Oxford, 1996.
4. Piefort V. Finite element modeling of piezoelectric active structures. Ph.D. Thesis, University of Brussels, Belgium, 2001.
5. Landis CM. Energetically consistent boundary conditions for electromechanical fracture. International Journal of Solids and Structures 2004; 41:6291-6315.
6. Batoz J-L, Dhatt G. Modélisation des structures par éléments finis. Editions Hermes: Paris, 1990.
7. Duran E. Electrostatique, Masson et Cie, 1964.
8. Hammond P. Electromagnetism for Engineers. Pergamon: New York, 1986.
9. Farhat C, Lesoinne M, Maman N. Mixed explicit/implicit time integration of coupled aeroelastic problems: three-field formulation, geometric conservation and distributed solution. International Journal for Numerical Methods in Fluids 1995; 21:807-835.
10. Lee WS, Kwon KC, Kim BK, Cho JH, Young SK. Frequency-shifting analysis of electrostatically tunable micro-mechanical actuator. Journal of Modeling and Simulation of Micro-systems 2001; 2(1):83-88.
11. Training Manual Introduction to ANSYS 5.7 for MEMs (1st edn). ANSYS Release: 5.7, 2001.
12. Rochus V, Duysinx P, Golinval JC. Finite element analysis of the electro-mechanical coupling in MEMs, ACOMEN. Second International Conference on Advanced Computational Methods in Engineering, 2002.
13. Rochus V, Rixen D, Golinval JC. Consistent vibration analysis of electrostatically coupled structures: application to microsystems. Tenth International Congress on Sound and Vibration, 2003.
14. Crisfield MA. Non-Linear Finite Element Analysis of Solids and Structures. Wiley: New York, 1991.
15. Allik H, Hughes TJR. Finite element method for piezoelectric vibration. International Journal for Numerical Methods in Engineering 1970; 2:151-157.
16. Pamidighantam S, Puers R, Tilmans HAC. Pull-in voltage analysis of fixed-fixed beams. Proceedings of MMEs 2001 2001; 269-272.
17. Young WC. Roark's Formulas for Stress and Strain. McGraw-Hill: New York, 1989.
18. Geradin M, Rixen D. Mechanical Vibrations Theory and Application to Structural Dynamics (2nd edn). Wiley: New York, 1997.
19. Zienkiewiez OC. The Finite Element Method. Elsevier: Amsterdam, 1977; 272-276.
20. Rochus V, Rixen D, Golinval JC. Modeling of electro-mechanical coupling problem using the finite element formulation. SPIEs 10th Annual International Symposium on Smart Structures and Materials, 2002.