Preparation and characterization of atomically clean, stoichiometric surfaces of AIN(0001)

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 1, 2005, Pages 72-77

  Mecouch, W J ^a   Wagner, B P ^a   Reitmeier, Z J ^a   Davis, R F ^a   Pandarinath, C ^b   Rodriguez, B J ^b   Nemanich, R J ^b  

^a North Carolina State University   (United States)

^b NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

OXYGENHYDROXIDE; VACUUM ANNEALING;

AMMONIA; ANNEALING; ELECTRON DIFFRACTION; HYDROCARBONS; MICROSTRUCTURE; STOICHIOMETRY; SURFACE CHEMISTRY; TEMPERATURE DISTRIBUTION; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

ALUMINUM NITRIDE;

EID: 31144446546     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1830497     Document Type: Article

References (11)

1. R. Schlesser, R. Dalmau, and Z. Sitar, J. Cryst. Growth 241, 416 (2002).
2. X. Hu, J. Deng, N. Pala, R. Gaska, M. S. Shur, C. Q. Chen, J. Yang, G. Simin, M. A. Khan, J. C. Rojo, and L. J. Schowalter, Appl. Phys. Lett. 82, 1299 (2003).
3. S. W. King, J. P. Barnak, M. D. Bremser, K. M. Tracy, C. Ronning, R. F. Davis, and R. J. Nemanich, J. Appl. Phys. 84, 5248 (1998).
4. K. N. Lee, S. M. Donovan, B. Gila, M. Overberg, J. D. Mackenzie, C. R. Abernathy, and R. G. Wilson, J. Electrochem. Soc. 147, 3087 (2000).
5. K. M. Tracy, W. J. Mecouch, R. F. Davis, and R. J. Nemanich, J. Appl. Phys. 94, 3163 (2003).
6. A. M. Roskowski, P. Q. Miraglia, E. A. Preble, S. Einfeldt, and R. F. Davis, J. Cryst. Growth 241, 141 (2002)
7. D. Briggs and M. P. Seah, Practical Surface Analysis, Vol. 1, Auger and X-ray Photoelectron Spectroscopy, 2nd ed. (Wiley, West Sussex, 1990).
8. S. W. King, C. Ronning, R. F. Davis, M. C. Benjamin, and R. J. Nemanich, J. Appl. Phys. 84, 2086 (1998).
9. B. L. Ward, J. D. Hartman, E. H. Hurt, K. M. Tracy, R. F. Davis, and R. J. Nemanich, J. Vac. Sci. Technol. B 18, 2082 (2000).
10. V. M. Bermudez, Chem. Phys. Lett. 317, 290 (2000).
11. J. F. Moulder, W. M. F. Sitcle, P. R. E. Sobol, and K. D. H. Bomben, Handbook of X-Ray Photoelectron Spectrocsopy, 1st ed. (Perkin-Elmer, Physical Electronics Dvision, Eden Prairie, MN, 1992).