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Surface and Coatings Technology

Volumn 200, Issue 9, 2006, Pages 2900-2908

Development of a hybrid coating process for deposition of diamond-like carbon films on microdrills

(3) Ueng, H Y a Guo, C T b Dittrich, K H c

a NATIONAL SUN YAT SEN UNIVERSITY (Taiwan)

b DIWAN COLLEGE OF MANAGEMENT (Taiwan)

c Roth and Rau Oberflächentechnik GmbH (Germany)

Author keywords

DLC; ECR; Microdrill; Raman

Indexed keywords

ADHESION; CHEMICAL VAPOR DEPOSITION; DRILLS; ELECTRON CYCLOTRON RESONANCE; FILMS; INORGANIC COATINGS; MULTILAYERS; PHYSICAL VAPOR DEPOSITION; STRENGTH OF MATERIALS;

HYBRID COATING; MICRODRILLS; MULTILAYER COATING;

DIAMOND LIKE CARBON FILMS;

ADHESION; CHEMICAL VAPOR DEPOSITION; DIAMOND LIKE CARBON FILMS; DRILLS; ELECTRON CYCLOTRON RESONANCE; FILMS; INORGANIC COATINGS; MULTILAYERS; PHYSICAL VAPOR DEPOSITION; STRENGTH OF MATERIALS;

EID: 31044450340 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.01.122 Document Type: Article

Times cited : (28)

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