Improved productivity on diamond-like carbon coating optical disk stamper

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 6, 2003, Pages 2540-2544

  Ueng, H Y ^a   Guo, C T ^a,b  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^b Tainan Science Based Industrial Park   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC RESISTANCE; ELECTRON CYCLOTRON RESONANCE; FRICTION; GRAPHITE; INJECTION MOLDING; OPTICAL COATINGS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY;

COOLING LUBRICANTS; OPTICAL DISK STAMPERS;

DIAMOND LIKE CARBON FILMS;

EID: 0942299747     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1624271     Document Type: Article

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