Study on strain and piezoelectric polarization of AlN thin films grown on Si

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 4, 2005, Pages 628-630

  Deng, Yongzhen ^a   Kong, Yuechan ^a   Zheng, Youdou ^a   Zhou, Chunhong ^a   Xi, Dongjuan ^a   Chen, Peng ^a   Gu, Shulin ^a   Shen, Bo ^a   Zhang, Rong ^a   Han, Ping ^a   Jiang, Ruolian ^a   Shi, Yi ^a  

^a NANJING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE STRESS; PIEZOELECTRIC DEVICES; POLARIZATION; RAMAN SCATTERING; STRAIN; THIN FILMS;

ALN CRYSTALS; ALN THIN FILMS; PIEZOELECTRIC POLARIZATION;

ALUMINUM COMPOUNDS;

EID: 31044440398     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1927533     Document Type: Article

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