Electron energy-loss spectrum imaging of high-k dielectric stacks

Applied Physics Letters

Volumn 88, Issue 2, 2006, Pages 1-3

  MacKenzie, M ^a   Craven, A J ^a   Hamilton, D A ^a   McComb, D W ^b  

^a UNIVERSITY OF GLASGOW   (United Kingdom)

^b IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DECOMPOSITION; DIELECTRIC DEVICES; ELECTRIC POWER DISTRIBUTION; ELECTRONIC PROPERTIES; SPECTROSCOPIC ANALYSIS; SPECTRUM ANALYSIS;

DIELECTRIC STACKS; ELECTRON ENERGY-LOSS; SPECTRUM IMAGING; SUBNANOMETER SCALE;

ENERGY DISSIPATION;

EID: 30744438050     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2163255     Document Type: Article

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