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Volumn 875, Issue , 2005, Pages 157-162

Strain relaxation in Si1-xGex thin films on Si (100) substrates: Modeling and comparisons with experiments

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL GROWTH; MICROELECTRONICS; OPTIMIZATION; PLASTIC DEFORMATION; SILICON COMPOUNDS; STRAIN;

FILM COMPOSITIONAL GRADING; MICROELECTRONIC TECHNOLOGIES; SEMICONDUCTOR THIN FILMS;

THIN FILMS;

EID: 30644460430 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: 10.1557/proc-875-o4.21 Document Type: Conference Paper

Times cited : (4)

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