Role of the substrate doping in the activation of Fe2+ centers in Fe implanted InP

Materials Research Society Symposium Proceedings

Volumn 864, Issue , 2005, Pages 21-26

  Cesca, T ^a   Gasparotto, A ^a   Mattei, G ^a   Verna, A ^a   Fraboni, B ^b   Impellizzeri, G ^c   Priolo, F ^c  

^a UNIVERSITY OF PADOVA   (Italy)

^b UNIVERSITY OF BOLOGNA   (Italy)

^c UNIVERSITY OF CATANIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DOPING (ADDITIVES); ION IMPLANTATION; SOLUBILITY;

FE SOLUBILITY; POST-IMPLANTATION ANNEALING; SUBSTRATE DOPING;

IRON;

EID: 30544451861     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-864-e1.5     Document Type: Conference Paper

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