SCOPUS 정보 검색 플랫폼

Volumn 47, Issue 6, 2005, Pages 546-548

Antenna-coupled microbolometers on a silicon-nitride membrane

Author keywords

Antenna coupled detectors; Microbolometers; Responsivity; Silicon nitride membrane; Thermal impedance

Indexed keywords

ANTENNA-COUPLED DETECTORS; MICROBOLOMETERS; RESPONSIVITY; SILICON NITRIDE MEMBRANES;

BOLOMETERS; GOLD; IMAGING SYSTEMS; SILICON NITRIDE; VANADIUM COMPOUNDS;

MEMBRANES;

EID: 30544446195 PISSN: 08952477 EISSN: None Source Type: Journal
DOI: 10.1002/mop.21226 Document Type: Article

Times cited : (10)

References (10)

1
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- Thermal impedance model of electrostatic discharge effects on microbolometers
- F.J. González, C. Fumeaux, J. Alda, and G.D. Boreman, Thermal impedance model of electrostatic discharge effects on microbolometers, Microwave Opt Technol Lett 26 (2000), 291-293.
- (2000) Microwave Opt Technol Lett , vol.26 , pp. 291-293
- González, F.J.¹ Fumeaux, C.² Alda, J.³ Boreman, G.D.⁴

2
- 11144354324
- Two-dimensional array of antenna-coupled detectors
- F.J. González, M.A. Gritz, C. Fumeaux, and G.D. Boreman, Two-dimensional array of antenna-coupled detectors, Int J Infrared Millimeter Waves 23 (2002), 785-797.
- (2002) Int J Infrared Millimeter Waves , vol.23 , pp. 785-797
- González, F.J.¹ Gritz, M.A.² Fumeaux, C.³ Boreman, G.D.⁴

3
- 14544300154
- Antenna-coupled infrared detectors for imaging applications
- F.J. González, B. Ilic, J. Alda, and G.D. Boreman, Antenna-coupled infrared detectors for imaging applications. IEEE JSTQE 11 (2005). 117-120.
- (2005) IEEE JSTQE , vol.11 , pp. 117-120
- González, F.J.¹ Ilic, B.² Alda, J.³ Boreman, G.D.⁴

4
- 0345328821
- Antenna-coupled microbolometer arrays with aerogel thermal isolation
- F.J. González, C.S. Ashley, P.C. Clem, and G.D. Boreman, Antenna-coupled microbolometer arrays with aerogel thermal isolation, Infrared Phys Tech 45 (2004), 47-51.
- (2004) Infrared Phys Tech , vol.45 , pp. 47-51
- González, F.J.¹ Ashley, C.S.² Clem, P.C.³ Boreman, G.D.⁴

5
- 0038450343
- Antenna-coupled VOx thin-film microbolometer array
- F.J. González, M. Abdel-Rahman, and G.D. Boreman, Antenna-coupled VOx thin-film microbolometer array, Microwave Opt Technol Lett 38 (2003), 235-237.
- (2003) Microwave Opt Technol Lett , vol.38 , pp. 235-237
- González, F.J.¹ Abdel-Rahman, M.² Boreman, G.D.³

6
- 0021204229
- Air-bridge microbolometer for far infrared detection
- D.P. Neikirk and D.B. Rutledge, Air-bridge microbolometer for far infrared detection, Appl Phys Lett 44 (1984), 153-155.
- (1984) Appl Phys Lett , vol.44 , pp. 153-155
- Neikirk, D.P.¹ Rutledge, D.B.²

7
- 0004095780
- Springer-Verlag
- M. Elwenspoek, and R. Wiegerink, Mechanical Microsensors, Springer-Verlag, 2001.
- (2001) Mechanical Microsensors
- Elwenspoek, M.¹ Wiegerink, R.²

8
- 1342308290
- Comparison of tensile and bulge tests for thin-film silicon nitride
- R.L. Edwards, G. Coles, and W.N. Sharpe, Jr., Comparison of tensile and bulge tests for thin-film silicon nitride, Experimen Mechan 44 (2004), 49-54.
- (2004) Experimen Mechan , vol.44 , pp. 49-54
- Edwards, R.L.¹ Coles, G.² Sharpe Jr., W.N.³

9
- 15544378552
- Determination of mechanical properties of PECVD silicon nitride thin films for tunable MEMS Fabry-Pèrot optical filters
- H. Huang, K. Winchester, Y. Liu, X.Z. Hu, C.A. Musca, J.M. Dell, and L. Faraone, Determination of mechanical properties of PECVD silicon nitride thin films for tunable MEMS Fabry-Pèrot optical filters, J Micromech Microengg 15 (2005), 608-614.
- (2005) J Micromech Microengg , vol.15 , pp. 608-614
- Huang, H.¹ Winchester, K.² Liu, Y.³ Hu, X.Z.⁴ Musca, C.A.⁵ Dell, J.M.⁶ Faraone, L.⁷

10
- 0942300071
- Fabrication of an infrared antenna-coupled microbolometer linear array using chrome as a mask
- M.A. Gritz, I. Puscasu, D. Spencer, et al., Fabrication of an infrared antenna-coupled microbolometer linear array using chrome as a mask, JVST B 21 (2003), 2608-2611.
- (2003) JVST B , vol.21 , pp. 2608-2611
- Gritz, M.A.¹ Puscasu, I.² Spencer, D.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.