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Volumn 21, Issue 3, 1999, Pages 16-20

Corrosion at the grain boundary and a fluorine-related passivation layer on etched AI-Cu (1 %) alloy surfaces

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EID: 3042971049     PISSN: 12256463     EISSN: None     Source Type: Journal    
DOI: 10.4218/etrij.99.0199.0303     Document Type: Article
Times cited : (4)

References (14)
  • 1
    • 0019553030 scopus 로고
    • Reactive Ion Etching Induced Corrosion of Al and Al-Cu Films
    • W. Y. Lee, J. M. Eldridge, and G. C. Schwartz, "Reactive Ion Etching Induced Corrosion of Al and Al-Cu Films," J. Appl. Phys., Vol. 52(4), 1981, pp. 2994-2999.
    • (1981) J. Appl. Phys. , vol.52 , Issue.4 , pp. 2994-2999
    • Lee, W.Y.1    Eldridge, J.M.2    Schwartz, G.C.3
  • 2
    • 0002668081 scopus 로고    scopus 로고
    • Review of Planarization and Reliability Aspects of Future Interconnect Materials
    • A. R. Sethuraman, J.-F. Wang, and L. M. Cook, "Review of Planarization and Reliability Aspects of Future Interconnect Materials," J. Elctronic. Materials, Vol. 25, 1996, pp. 1617-22.
    • (1996) J. Elctronic. Materials , vol.25 , pp. 1617-1622
    • Sethuraman, A.R.1    Wang, J.-F.2    Cook, L.M.3
  • 3
    • 0347452141 scopus 로고    scopus 로고
    • Cu Behaviors Induced by Aging and their Effects on Electromigration Resistance on Al-Cu Lines
    • T. Nogami and T. Nemoto, "Cu Behaviors Induced by Aging and their Effects on Electromigration Resistance on Al-Cu Lines," Proceedings of AIP Conference, 1996, pp. 198-213.
    • (1996) Proceedings of AIP Conference , pp. 198-213
    • Nogami, T.1    Nemoto, T.2
  • 7
    • 0346190883 scopus 로고
    • Effect of Post-etch Treatment on Chlorine Concentration of AlSi and Ti-capped AlSi Films
    • J.-S. Maa, H. Gossenberger, and R. J. Paff, "Effect of Post-etch Treatment on Chlorine Concentration of AlSi and Ti-capped AlSi Films," J. Vac. Sci. Technol., B8(5), 1990, pp. 1052-1057.
    • (1990) J. Vac. Sci. Technol. , vol.B8 , Issue.5 , pp. 1052-1057
    • Maa, J.-S.1    Gossenberger, H.2    Paff, R.J.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.