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Volumn 165, Issue 1-3, 2004, Pages 209-214
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Infrared multiphoton dissociation of SiF4: Gas phase reactions of SiF3 with F and H2
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Author keywords
Infrared multiphoton dissociation; Reaction rate; Silicon tetrafluoride; Trifluorosilyl
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Indexed keywords
FLUORIDE;
FLUORINE;
HYDROGEN;
SILICON DERIVATIVE;
TRIETHYLAMINE;
ARTICLE;
CARBON DIOXIDE LASER;
CHEMICAL REACTION;
CHEMICAL REACTION KINETICS;
CONTROLLED STUDY;
DISSOCIATION;
GAS;
INFRARED RADIATION;
PHOTON;
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EID: 3042836181
PISSN: 10106030
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jphotochem.2004.03.019 Document Type: Article |
Times cited : (6)
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References (25)
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