Characterizing mechanical resonators by means of a scanning acoustic force microscope

Applied Physics Letters

Volumn 77, Issue 12, 2000, Pages 1792-1794

  Sthal, F ^a   Bourquin, R ^a  

^a Centre National de la Recherche Scientifique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001154586     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1311317     Document Type: Article

References (23)

1. G. Binnig, H. Rohrer, Ch. Gerber, and E. Weibel, Phys. Rev. Lett. 49, 57 (1982).
2. G. Binnig, C. F. Quate, and Ch. Gerber, Phys. Rev. Lett. 56, 930 (1986).
3. L. Rayleigh, Philos. Mag. 42, 167 (1896).
4. W. Dürr, D. A. Sinclair, and E. A. Ash, Electron. Lett. 21, 805 (1980).
5. J. K. Zienuck and A. Latuszek, in Proceedings IEEE Ultrasonics Symposium, 17-19 November, Williamsburg, edited by B. R. McAvoy, p. 1037 (1986).
6. B. T. Khuri-Yakub, S. Akamine, B. Hadimioglu, H. Yamada, and C. F. Quate, Proc. SPIE 1556, 30 (1991).
7. K. Takata, T. Hasegawa, S. Hosoka, S. Hosoki, and T. Komoda, Appl. Phys. Lett. 55, 1718 (1989).
8. P. Günther, U. Ch. Fisher, and K. Dransfeld, Appl. Phys. B: Photophys. Laser Chem. 48, 89 (1989).
9. K. Uozumi and K. Yamamuro, Jpn. J. Appl. Phys., Part 2 28, L1297 (1989).
10. A. Kulik, J. Attal, and G. Gremaud, in Acoustical Imaging, Nanjing, China, edited by Y. Wei and B. Gu (Plenum, New York, 1992), Vol. 20.
11. B. Cretin and F. Sthal, Appl. Phys. Lett. 62, 829 (1993).
12. J. Heil, J. Wesner, and W. Grill, J. Appl. Phys. 64, 1939 (1998).
13. W. Rohrbeck, E. Chilla, H. J. Fröhlich, and J. Riedel, Appl. Phys. A: Solids Surf. 52, 344 (1991).
14. E. Chilla, W. Rohrbeck, and H. J. Fröhlich, Appl. Phys. Lett. 61, 3107 (1993).
15. O. Kolosov and K. Yamanaka, Jpn. J. Appl. Phys., Part 2 32, L1095 (1993).
16. K. Yamanaka, H. Ogiso, and O. Kolosov, Appl. Phys. Lett. 64, 178 (1993).
17. U. Rabe and A. Arnold, Appl. Phys. Lett. 64, 1493 (1994).
18. F. Ouveley, G. Gremaud, A. Sémoroz, A. J. Kulik, N. A. Burnham, and E. Dupas, Rev. Sci. Instrum. 69, 2085 (1998).
19. W. J. Spencer, Phys. Acoust. 5, 167 (1972).
20. H. Bahadur and R. Parshad, Phys. Acoust. 16, 37 (1982).
21. B. Cappelle, J. Détaint, Y. Zheng, J. Schwartzel, and A. Zarka, in Proceedings 4th European Frequency and Time Forum, 13-15 March, Neuchâtel, Switzerland, edited by FSRM (Neuchâtel, 1990), p. 675.
22. R. J. Besson, French Patent No. 7,802,261 (1978).
23. U. Rabe, K. Janser, and W. Arnold, Rev. Sci. Instrum. 67, 3281 (1996).