Surface shape and contact pressure evolution in two component surfaces: Application to copper chemical mechanical polishing

Tribology Letters

Volumn 17, Issue 2, 2004, Pages 139-145

  Sawyer, W G ^a  

^a UNIVERSITY OF FLORIDA   (United States)

Author keywords

Chemical mechanical polishing; Composites; Wear

Indexed keywords

COPPER; POLISHING; WEAR;

EID: 3042820620     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1023/B:TRIL.0000032438.56992.be     Document Type: Article

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