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Volumn 3, Issue , 1997, Pages 1306-1311
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Micro-conveying station for assembly of micro-components
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Author keywords
[No Author keywords available]
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Indexed keywords
ACOUSTIC SURFACE WAVE DEVICES;
ACOUSTIC WAVES;
CLOSED LOOP CONTROL SYSTEMS;
CONVEYORS;
GRIPPERS;
IDENTIFICATION (CONTROL SYSTEMS);
NEURAL NETWORKS;
PHOTOLITHOGRAPHY;
POSITION CONTROL;
SHAPE MEMORY EFFECT;
THREE TERM CONTROL SYSTEMS;
TRANSDUCERS;
MICROCOMPONENT ASSEMBLY;
MICROCONVEYING STATIONS;
MICROGRIPPERS;
STEREOPHOTOLITHOGRAPHY;
ROBOTIC ASSEMBLY;
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EID: 0031347734
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (10)
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References (10)
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