Realisation of very high voltage electrode-nozzle systems for MEMS

Sensors and Actuators, A: Physical

Volumn 114, Issue 1, 2004, Pages 112-117

  Paine, Mark D ^a,b   Gabriel, Steve ^a   Schabmueller, Christian G J ^a,c   Evans, Alan G R ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

^b QUEEN MARY UNIVERSITY OF LONDON   (United Kingdom)

^c FRAUNHOFER INSTITUTE FOR SILICON TECHNOLOGY ISIT   (Germany)

Author keywords

Breakdown; Electrospray; High voltage; Silicon dioxide; Thruster

Indexed keywords

ELECTRIC BREAKDOWN; ELECTRIC POTENTIAL; ELECTRODES; IONS; NOZZLES; SILICA;

BREAKDOWN; ELECTROSPRAY; HIGH VOLTAGE; THRUSTER;

MICROELECTROMECHANICAL DEVICES;

EID: 3042814095     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.02.013     Document Type: Article

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