Improvement in structural and electrical properties of (Ba 0.5Sr0.5)TiO3 capacitors using (Ba 0.5Sr0.5)RuO3 conductive layers at (Ba 0.5Sr0.5)TiO3/Pt interface

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 4 A, 2004, Pages 1442-1445

  Oh, Young Nam ^a   Yoon, Soon Gil ^a  

^a Chungnam National University   (South Korea)

Author keywords

(Ba0.5Sr 0.5)RuO3 interlayers; (Ba0.5Sr0.5)TiO3; Interface capacity; LDMOCVD; Pulsed laser deposition

Indexed keywords

BARIUM COMPOUNDS; CRYSTAL STRUCTURE; DIELECTRIC PROPERTIES; FILM GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROSTRUCTURE; PULSED LASER DEPOSITION; SURFACE ROUGHNESS; SURFACE TENSION; THIN FILMS;

HIGH DIELECTRIC CONSTANT MATERIALS; INTERFACE CAPACITY; INTERLAYERS; PULSE ENERGY DENSITY;

CAPACITORS;

EID: 3042813622     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.1442     Document Type: Article

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