Evaluation of a surface acoustic wave motor output force

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 250-255

  Chiba, Makoto ^a   Takahashi, Masakazu ^a   Kurosawa, Minoru ^a   Higuchi, Toshiro ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACTUATORS; ELECTRIC DRIVES; FORCE CONTROL; FREQUENCY RESPONSE; STATORS; VIBRATIONS (MECHANICAL);

OPTIMUM PRELOAD; SURFACE ACOUSTIC WAVE (SAW) MOTORS;

ELECTRIC MOTORS;

EID: 0030651267     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)