3-nm Gap fabrication using gas phase sacrificial etching for quantum devices

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 418-421

  Hamaguchi, K ^a   Tsuchiya, T ^a   Shimaoka, K ^a   Funabashi, H ^a  

^a Rd Management Section   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; IMAGE ANALYSIS; NANOTECHNOLOGY; OXIDATION; SILICON; SOLUTIONS; SPUTTERING; THERMIONIC EMISSION; TRANSMISSION ELECTRON MICROSCOPY;

MOLECULAR BEHAVIORS; NANOGAPS; QUANTUM DEVICES;

QUANTUM ELECTRONICS;

EID: 3042740954     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

1. D. L. Kendall, "A new theory for the anisotropic etching of silicon and some underdeveloped chemical micromachining concepts," J. Vac. Sci. Technol. A, vol. 8, pp. 3598-3605, 1990.
2. O. Tabata, R. Asahi, H. Funabashi, K. Shimaoka, and S. Sugiyama, "Anisotropic etching of silicon in TMAH solutions," Sens. Actuators A, vol. 34, pp. 51-57, 1992.
3. 2 in Acidic Fluoride Solutions," J. Electrochem. Soc., vol. 118. pp. 1772-1775, 1971.
4. 2," Appl. Phys. Lett., vol. 34, pp. 70-73, 1979.
5. A. E. T. Kuiper and E. G. C. Lathouwers, "Room-temperature HF vapor-phase cleaning for low-pressure chemical vapor deposition of epitaxial Si and SiGe layers," J. Electrochem. Soc., vol. 139, pp. 2594-2599, 1992.
6. Y. Lee, K. Park, J. Lee, C. Lee, H. J. Yoo, C. Kim, and Y. Yoon, "Dry release for surface micromachining with HF vapor-phase etching," J. Microelectromech. Sys., vol. 6, pp. 226-233, 1997.
7. Y. Hishinuma, T. H. Geballe, B. Y. Moyzhes, and T. W. Kenny, "Refrigeration by combined tunneling and thermionic emission in vacuum: Use of nanometer scale design," Appl. Phys. Lett., vol. 78, pp. 2572-2574, 2001.
8. L. Pauling, "The sizes of ions and the structure of ionic crystals," J. Am. Chem. Soc., vol. 49, pp. 765-790, 1927.
9. L. E. Sutton Ed., Tables of Interatomic Distances and Configuration in Molecules and Ions, The Chemical Society Special Publication, London: The Chemical Society, 1958, 1965, No. 11, 18.
10. D. R. Lide, Ed., CRC Handbook of Chemistry and Physics, 79th ed. Boca Raton, FL: CRC, 1998.
11. N. A. Lange, Ed., Handbook of Chemistry, 10th ed. New York: McGraw-Hill Book Company, Inc., 1961.