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Volumn , Issue , 2004, Pages 418-421

3-nm Gap fabrication using gas phase sacrificial etching for quantum devices

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; IMAGE ANALYSIS; NANOTECHNOLOGY; OXIDATION; SILICON; SOLUTIONS; SPUTTERING; THERMIONIC EMISSION; TRANSMISSION ELECTRON MICROSCOPY;

EID: 3042740954     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (3)

References (11)
  • 1
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    • A new theory for the anisotropic etching of silicon and some underdeveloped chemical micromachining concepts
    • D. L. Kendall, "A new theory for the anisotropic etching of silicon and some underdeveloped chemical micromachining concepts," J. Vac. Sci. Technol. A, vol. 8, pp. 3598-3605, 1990.
    • (1990) J. Vac. Sci. Technol. A , vol.8 , pp. 3598-3605
    • Kendall, D.L.1
  • 3
    • 67651141655 scopus 로고
    • 2 in acidic fluoride solutions
    • 2 in Acidic Fluoride Solutions," J. Electrochem. Soc., vol. 118. pp. 1772-1775, 1971.
    • (1971) J. Electrochem. Soc. , vol.118 , pp. 1772-1775
    • Judge, J.S.1
  • 5
    • 0026914357 scopus 로고
    • Room-temperature HF vapor-phase cleaning for low-pressure chemical vapor deposition of epitaxial Si and SiGe layers
    • A. E. T. Kuiper and E. G. C. Lathouwers, "Room-temperature HF vapor-phase cleaning for low-pressure chemical vapor deposition of epitaxial Si and SiGe layers," J. Electrochem. Soc., vol. 139, pp. 2594-2599, 1992.
    • (1992) J. Electrochem. Soc. , vol.139 , pp. 2594-2599
    • Kuiper, A.E.T.1    Lathouwers, E.G.C.2
  • 7
    • 0035938301 scopus 로고    scopus 로고
    • Refrigeration by combined tunneling and thermionic emission in vacuum: Use of nanometer scale design
    • Y. Hishinuma, T. H. Geballe, B. Y. Moyzhes, and T. W. Kenny, "Refrigeration by combined tunneling and thermionic emission in vacuum: Use of nanometer scale design," Appl. Phys. Lett., vol. 78, pp. 2572-2574, 2001.
    • (2001) Appl. Phys. Lett. , vol.78 , pp. 2572-2574
    • Hishinuma, Y.1    Geballe, T.H.2    Moyzhes, B.Y.3    Kenny, T.W.4
  • 8
    • 33947344744 scopus 로고
    • The sizes of ions and the structure of ionic crystals
    • L. Pauling, "The sizes of ions and the structure of ionic crystals," J. Am. Chem. Soc., vol. 49, pp. 765-790, 1927.
    • (1927) J. Am. Chem. Soc. , vol.49 , pp. 765-790
    • Pauling, L.1
  • 10
    • 0003998388 scopus 로고    scopus 로고
    • CRC handbook of chemistry and physics
    • FL: CRC
    • D. R. Lide, Ed., CRC Handbook of Chemistry and Physics, 79th ed. Boca Raton, FL: CRC, 1998.
    • (1998) 79th Ed. Boca Raton
    • Lide, D.R.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.