Ion-induced nucleation in nanoparticle synthesis by ionization chemical vapor deposition

Aerosol Science and Technology

Volumn 38, Issue 5, 2004, Pages 496-505

  Adachi, Motoaki ^a   Kusumi, Masataka ^a   Tsukui, Shigeki ^a  

^a Osaka Prefecture University   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CONDENSATION; GASES; IONIZATION;

ION-INDUCED NUCLEATION; NANOPARTICLE SYNTHESIS;

NANOSTRUCTURED MATERIALS;

ION; NANOPARTICLE; SILICATE; TETRAETHOXYSILANE; UNCLASSIFIED DRUG;

ARTICLE; CHEMICAL VAPOR DEPOSITION; CONCENTRATION (PARAMETERS); ELECTRICITY; FURNACE; GAS; IONIZATION; MEASUREMENT; POLYMERIZATION; PRIORITY JOURNAL; REACTOR; SYNTHESIS; TEMPERATURE;

EID: 3042732141     PISSN: 02786826     EISSN: None     Source Type: Journal    
DOI: 10.1080/02786820490460734     Document Type: Article

References (15)

1. Adachi, M., Fujimoto, T., Nakaso, K., Okuyama, K., Shi, F. G., Sato, H., Ando, T., and Tomioka, H. (1999). Film Formation by Motion Control of Ionized Precursors in Electric Field, Appl. Phys. Lett. 75:1973-1975.
2. Adachi, M., Hayashi, T., Fujimoto, T., and Okuyama, K. (1997). A New CVD Film Formation Process Using Ionization of TEOS. In IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings, IEEE Inc., pp. 103-105.
3. Adachi, M., Okuyama, K., and Fujimoto, T. (1995a). Film Formation by a New Chemical Vapor Deposition Process Using Ionization of Tetraethylorthosilicate, Jpn. J. Appl. Phys. 34:L1148-L1150.
4. Adachi, M., Okuyama, K., and Tohge, N. (1995b). Particle Generation and Film Formation in an Atmospheric-Pressure Chemical Vapor Deposition Process Using Tetraethylorthosilicate, J. Mater. Sci. 30:932-937.
5. Adachi, M., Pui, D. Y. H., and Liu, B. Y. H. (1993). Aerosol Charge Neutralization by a Corona Ionizer, Aerosol Sci. Technol. 18:48-58.
6. Adachi, M., Tsukui, S., and Okuyama, K. (2002). Nano-Particle Synthesis by Ionization Chemical Vapor Deposition. In Abstracts of Sixth International Aerosol Conference, edited by C.-S. Wang. International Aerosol Research Assembly, Taipei, Taiwan, Vol. 1, pp. 472-476.
7. Adachi, M., Tsukui, S., and Okuyama, K. (2003a). Nanoparticle Synthesis by Ionizing the Source Gas in Chemical Vapor Deposition, Jpn. J. Appl. Phys. 42:L77-L79.
8. Adachi, M., Tsukui, S., and Okuyama, K. (2003b). Nanoparticle Formation Mechanism in CVD Reactor with Ionization of Source Vapor, J. Nanoparticle Res. 5:31-37.
9. Ahn, K.-H., Yoo, J. U., and Kim, Y. W. (2001a). Corona Ion Assisted Nanoparticle Morphology Control in an Atmospheric Pressure Furnace Reactor. In Abstracts of the 2nd Asian Aerosol Conference, Asian Aerosol Research Assembly, Pusan, Korea, pp. 203-204.
10. 2 Particle Agglomeration Control in a Furnace Reactor with Electro-Spray Assisted Synthesis. In Book of Abstract, International Symposium on "Nanoparticles: Aerosols and Materials," edited by F. Otten et al., Gerhard-Mercator University Duisburg, Duisburg, Germany, pp. 64-65.
11. Caledonia, G. E. (1975). A Survey of the Gas-Phase Negative Ion Kinetics of Inorganic Molecules. Electron Attachment Reactions, Chem. Rev. 73:333-351.
12. Dutton, J. (1975). A Survey of Electron Swarm Data, J. Phys. Chem. Ref. Data 4:577-857.
13. 2O, CO, and Mixtures of These Gases at High Pressures, J. Chem. Phys. 45:4617-4627.
14. Nakaso, K., Han, B., Ahn, K. H., Choi, M., and Okuyama, K. (2003). Synthesis of Non-Agglomerated nanoparticles by an Electrospray assisted Chemical Vapor Deposition (ES=CVD) Method, Aerosol Sci. 34:869-881.
15. Snuggs, R. M., Volz, D. J., Schummers, J. H., Martin, D. W., and MacDaniel, E. W. (1971). Mobilities and Longitudinal diffusion Coefficients of Mass-Identified Potassium Ions and Positive and negative Oxygen Ions in Oxygen, Phys. Rev. A 3:477-487.