Film formation by motion control of ionized precursors in electric field

Applied Physics Letters

Volumn 75, Issue 13, 1999, Pages 1973-1975

  Adachi, Motoaki ^a   Fujimoto, Toshiyuki ^b   Nakaso, Koichi ^b   Okuyama, Kikuo ^b   Shi, Frank G ^c   Sato, Hideki ^d   Ando, Toshio ^d   Tomioka, Hideki ^d  

^a Osaka City University   (Japan)

^b HIROSHIMA UNIVERSITY   (Japan)

^c UNIVERSITY OF CALIFORNIA   (United States)

^d HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037885122     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124889     Document Type: Article

References (5)

1. M. Adachi, K. Okuyama, and T. Fujimoto, Jpn. J. Appl. Phys., Part 2 34, L1148 (1995).
2. M. Adachi, T. Hayashi, T. Fujimoto, and K. Okuyama, 1997 IEEE International Symposium on Semiconductor Manufacturing Comf. Proc. P-103 (IEEE, New York, 1997).
3. K. Okuyama, T. Fujimoto, T. Hayashi, and M. Adachi, AIChE. J. 43, 2688 (1997).
4. K. Fujino, Y. Nishimoto, N. Takumasu, and K. Maeda, J. Electrochem. Soc. 137, 2883 (1990).
5. M. Adachi, K. Okuyama, N. Tohge, M. Shimada, J. Sato, and M. Muroyama, Jpn. J. Appl. Phys., Part 2 31, L1439 (1992).