Photon-stimulated desorption of F- ions from CF3Cl adsorbed on Si(111)-7×7

Journal of Chemical Physics

Volumn 120, Issue 23, 2004, Pages 11144-11154

  Wen, C R ^a   Chou, L C ^a,b  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b UNITED MICROELECTRONICS CORPORATION   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DESORPTION; DISSOCIATION; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRONS; IONS; PHOTONS; RESONANCE;

DIPOLAR DISSOCIATION (DD); ELECTRON MEDIATED DIPOLAR DISSOCIATION (EMDD); PHOTON-SIMULATED DESORPTION (PSD);

MOLECULAR DYNAMICS;

EID: 3042680642     PISSN: 00219606     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1738638     Document Type: Article

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