The application of FIB milling for specimen preparation from crystalline germanium

Micron

Volumn 35, Issue 7, 2004, Pages 549-556

  Rubanov, S ^a,b   Munroe, P R ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

^b UNIVERSITY OF MELBOURNE   (Australia)

Author keywords

Damage; Focused ion beam; Germanium; Sample preparation; Transmission electron microscopy

Indexed keywords

EID: 3042642380     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.micron.2004.03.004     Document Type: Article

References (19)

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