Translating overall production goals into distributed flow control parameters for semiconductor manufacturing

Journal of Manufacturing Systems

Volumn 22, Issue 1, 2003, Pages 46-63

  Hu, Ming Der ^a   Chang, Shi Chung ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Approximation Analysis; Flow Control Requirements; Queuing Models; Reentrant Production Lines; Wafer Fabrication Systems

Indexed keywords

APPROXIMATION THEORY; COMPUTER ARCHITECTURE; CONTROL SYSTEMS; INTEGRATED CIRCUITS; MATHEMATICAL MODELS; PARAMETER ESTIMATION; PROBLEM SOLVING; QUEUEING NETWORKS;

APPROXIMATION ANALYSIS; FLOW CONTROL REQUIREMENTS; QUEUING MODELS; REENTRANT PRODUCTION LINES; WAFER FABRICATION SYSTEMS;

SEMICONDUCTOR MATERIALS;

EID: 3042602353     PISSN: 02786125     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0278-6125(03)90004-5     Document Type: Article

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