Towards automated micromachining of PMMA micro channels using CO 2 laser and sacrificial mask process

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 2004, Issue 1, 2004, Pages 57-62

  Shi, Guangyi ^a   Huang, Qiang ^a   Li, Wen J ^b   Huang, Wenqian ^a   Shi, Gengchen ^a   Li, Kejie ^a  

^a BEIJING INSTITUTE OF TECHNOLOGY   (China)

^b CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON DIOXIDE LASERS; CHEMICAL ANALYSIS; ELECTRON ENERGY LEVELS; LASER BEAMS; LITHOGRAPHY; MICROBIOLOGY; MICROELECTROMECHANICAL DEVICES; POLYMETHYL METHACRYLATES; SUBSTRATES; SURFACE ROUGHNESS;

LASER-MICROMACHINING; MICROFLUIDIC DEVICES; PMMA MICRO CHANNELS; SACRIFICIAL MASK PROCESS;

MICROMACHINING;

EID: 3042585181     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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