Process characterization of fabricating 3D micro channel systems by laser-micromachining

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 749-757

  Qin, S J ^a   Li, Wen J ^a  

^a CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

3D micro channel system; Laser micromachining; Micro channel fabrication; Quartz processing

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SOFTWARE; ELECTRIC BREAKDOWN; ELECTRIC FIELDS; INFRARED SPECTROSCOPY; LASER APPLICATIONS; MICROMACHINING; NEODYMIUM LASERS; PLASMAS; SUBSTRATES; THERMODYNAMIC PROPERTIES; ULTRAVIOLET SPECTROSCOPY;

LASER-MICROMACHINING; MICRO CHANNEL FABRICATION; THERMAL ENERGY; THREE DIMENSIONAL MICRO CHANNEL; THREE DIMENSIONAL QUARTZ SUBSTRATE;

QUARTZ;

EID: 0036544220     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00016-X     Document Type: Conference Paper

References (9)

1. Fabrication of quartz micro-capillary electrophoresis chips for health care devices
2. Fabrication of electrophoresis devices on quartz and glass substrates using a bonding with HF solution
3. High-quality and high-efficiency machining of glass materials by laser-induced plasma-assisted ablation using conventional nanosecond UV, visible, and infrared lasers
4. Micromachining of quartz with ultrashort laser pulses
5. Fabrication of complex micro channel systems inside optically transparent 3D substrates by laser processing
6. Micromachining of complex channel systems in 3D quartz substrates using Q-switched Nd:YAG laser
7. Material processing with Nd-lasers