Fabrication of nano channel systems in quartz by laser-induced splitting

Proceedings of the IEEE Conference on Nanotechnology

Volumn 2001-January, Issue , 2001, Pages 233-237

  Qin, Julia S J ^a   Li, Wen J ^a  

^a CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CAPILLARY ELECTROPHORESIS; FUSED SILICA; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; SILICA;

FABRICATION TECHNIQUE; FUSED SILICA SUBSTRATES; HIGH ASPECT RATIO; LASER INDUCED; LASER PROCESS; NANO CHANNELS; ND : YAG LASERS; RECTANGULAR CHANNEL;

NEODYMIUM LASERS;

EID: 52949103442     PISSN: 19449399     EISSN: 19449380     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2001.966425     Document Type: Conference Paper

References (4)

1. J. Chapman and J. Hobbs, "Putting Capillary Electrophoresis to Work", LC-GC Magazine, Vol. 17, No. 3, pp. 86-99, February 1999.
2. R. Kuhn, S. Hoffstetter-Kuhn, Capillary Electrophoresis: Principles and Practice, Springer-Verlag: Berlin, 1993.
3. K. Matsumoto, T. Kawakami, M. Nakao, Y. Hatamura, T. Kitamori, and T. Sawada, "Nanochannel on quartz-chip laboratory using single molecular detectable thermal lens microscope", IEEE MEMS 1998, pp. 127-130.
4. S. J. Qin, W. J. Li, "Micromachining of Complex Channel Systems in 3D Quartz Substrates Using Q-Switched Nd: YAG Laser", Applied Physics A, accepted, June 2001.