Preparation and characterization of dielectric (Y-doped BaTiO3) and resistive (TaN) films for distributed rc network

Integrated Ferroelectrics

Volumn 37, Issue 1-4, 2001, Pages 83-93

  Choi, Won Youl ^a   McKinstry, Susan Trolier ^b  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

BaTiCO3 thin film; Pulsed laser deposition; RC notch filter; TaN thin film; Y doping

Indexed keywords

INSTRUMENTATION SYSTEMS; NOTCH RESISTANCE (RN);

BARIUM COMPOUNDS; DIELECTRIC FILMS; DOPING (ADDITIVES); HARMONIC DISTORTION; PULSED LASER DEPOSITION; TELECOMMUNICATION NETWORKS; YTTRIUM;

THIN FILMS;

EID: 3042560616     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580108015668     Document Type: Conference Paper

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