Study of the structural and optical properties of GaPN thin films grown by magnetron RF sputtering

Vacuum

Volumn 80, Issue 5, 2006, Pages 468-474

  Pulzara Mora, A ^a,b   Melendez Lira M ^a   Jimenez Sandoval S ^a   Lopez Lopez, M ^a  

^a DEPARTAMENTO DE FÍSICA   (Mexico)

^b UNIVERSIDAD NACIONAL DE COLOMBIA   (Colombia)

Author keywords

Band gap; GaPN; Raman spectroscopy; RF magnetron sputtering

Indexed keywords

ATOMIC FORCE MICROSCOPY; GALLIUM COMPOUNDS; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; PARTIAL PRESSURE; RAMAN SPECTROSCOPY;

BAND GAP; GAPN; RF MAGNETRON SPUTTERING;

THIN FILMS;

EID: 30344474286     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.07.039     Document Type: Article

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