Observation of vacancy clusters in HTCVD grown SiC

Materials Science Forum

Volumn 483-485, Issue , 2005, Pages 469-472

  Aavikko, Reino ^a   Saarinen, Kimmo ^a   Magnusson, B ^b   Janzen E ^b  

^a AALTO UNIVERSITY   (Finland)

^b LINKÖPING UNIVERSITY   (Sweden)

Author keywords

Atomic superposition; HTCVD; Positron; SiC; Vacancy cluster

Indexed keywords

CHEMICAL VAPOR DEPOSITION; HIGH TEMPERATURE EFFECTS;

ATOMIC SUPERPOSITION; ATOMIC SUPERPOSITION CALCULATIONS; VACANCY CLUSTERS;

SILICON CARBIDE;

EID: 30344436587     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-963-6.469     Document Type: Conference Paper

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