Ti-containing amorphous carbon nanocomposite coatings prepared by means of eight-target arc-assisted middle frequency magnetron sputtering

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 44, Issue 28-32, 2005, Pages

  Yang, Bing ^a   Huang, Zhihong ^a   Liu, Chuansheng ^a   Zeng, Zhaoyuan ^a   Fan, Xiangjun ^a   Dejun, F U ^a  

^a WUHAN UNIVERSITY   (China)

Author keywords

Middle frequency magnetron sputtering; Nanocomposite coating; Ti containing amorphous carbon

Indexed keywords

CARBON; HARDNESS; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; PERFORMANCE; TRANSMISSION ELECTRON MICROSCOPY;

MIDDLE FREQUENCY MAGNETRON SPUTTERING; NANOCOMPOSITE COATING; TI-CONTAINING AMORPHOUS CARBON;

NANOSTRUCTURED MATERIALS;

EID: 30344434337     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.44.L1022     Document Type: Article

References (13)

1. A. Grill: Diamond Relat. Mater. 8 (1999) 428.
2. Y. Lifshitz: Diamond Relat. Mater. 8 (1999) 1659.
3. Robertson: Mater. Sci. Eng. R 37 (2002) 129.
4. S. Yang and D. G. Teer: Surf. Coat. Technol. 131 (2000) 412.
5. B. Feng, D. M. Cao and W. J. Meng: Surf. Coat. Technol. 148 (2001) 153.
6. U. Heister, J. Krempel-Hesse and J. Szczyrbowski: Thin Solid Films 351 (1999) 27.
7. J. Szczyrbowski, G. Bräuer and G. Teschner: J. Non-Cryst. Solids 218 (1997) 25.
8. B. Szyszka: Thin Solid Films 351 (1999) 164.
9. C. Schönjahn, H. Paritong and W. D. Munz: J. Vac. Sci. Technol. A 19 (2001) 1392.
10. C. Corbella, M. Vives and A. Pinyol: Surf. Coat. Technol. 177-178 (2004) 409.
11. F. Tuinstra and J. Koenig: J. Chem. Phys. 53 (1970) 1126.
12. B. K. Tay, Y. H. Cheng, X. Z. Ding, S. P. Lau, X. Shi, G. F. You and D. Sheeja: Diamond Relat. Mater. 10 (2001) 1082.
13. R. W. Siegel: Proc. ATC Int. Symp. (ACTA), October 29-30, Tokyo, Japan, 1996.