Spectroscopic analysis and semiconductor properties of amorphous thin films containing silicon-carbon-nitrogen deposited via a polymeric route

Canadian Journal of Analytical Sciences and Spectroscopy

Volumn 48, Issue 1, 2003, Pages 77-84

  Martic, Sanela ^a   Campbell, Julia ^a   Bercu, Mircea ^b   Aktik, Cetin ^c   Scarlete, Mihai ^a  

^a BISHOP'S UNIVERSITY   (Canada)

^b HORIA HULUBEI NATIONAL INSTITUTE OF PHYSICS AND NUCLEAR ENGINEERING   (Romania)

^c UNIVERSITÉ DE SHERBROOKE   (Canada)

Author keywords

Ceramic precursors; Pyrolysis of polysilanes; Silicon carbide; Silicon carbonitride; Thin film

Indexed keywords

EID: 30244487558     PISSN: 12056685     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (30)

1. N.S.C.K. Vive, R.J.P. Corriu, D. Leclerc, P.H. Mutin, and A. Vioux, Chem. Mater., 4, 141 (1992).
2. R.J.P. Corriu, Angew. Chem. Int. Ed., 39, 1376 (2000).
3. S. Yajima, Phil. Trans. R. Soc. Land. A., 419, 294 (1980).
4. W. Verbeek and H. Winter, German Patent No. 2236078 (to Bayer), 1974 (Chem.Abs., 81, 8094, 1974).
5. T. Hirai and T. Goto, J. Mater. Sci., 16, 17 (1981).
6. K. Shiina and M. Kumanda, J.Org. Chem., 23, 139, (1958).
7. M. Scarlete, S. Brienne, I.S. Butler, and J.F. Harrod, Chem. Mater., 6, 977 (1994).
8. F. Babonneau, J. Maquet, C. Bonhomme and R. Richter, Chem. Mater., 8, 1415 (1996).
9. K.A. Brown-Wesley and R.A. Sinclair, U.S.Pat. no.4537942, Aug.27 (1985).
10. J. Rabe and D. Bujalski, Europ. Pat. Appl. no.200326, Mar. 16 (1986).
11. K. Okamura, M. Sato, and Y. Hasegawa, Ceram. Int., 13, 55 (1987).
12. G.T. Burns and G. Chandra, Commun. Amer. Ceram. Soc., 72, 333 (1989).
13. T. Taki, M. Inui, K. Okamura, and M. Sato, J. Mater. Sci. Lett., 8, 1119 (1989).
14. R.J.P. Corriu, D. Leclerc, P.H. Mutin, and A. Vioux, Chem. Mater., 4, 711 (1992).
15. W.R. Schmidt, P.S. Marchetti, L.V. Interrante, W.J. Hurley, R.H. Lewis Jr., R.H. Doremus, and G.E. Maciel, Chem. Mater., 4, 937 (1992).
16. H.N. Han, D.A. Lindquist, J.S. Haggerty, and D. Seyferth, Chem. Mater., 4, 705 (1992).
17. M.R. Mucalo, N.B. Milestone, I.C. Vickridge and M.V. Swain, J. Mater. Sci., 29, 4487 (1994).
18. Y. Mu, J.F. Harrod, and R.M. Laine, J. Appl. Organomet. Chem. 36, 184 (1991).
19. O. Funayama, M. Arai, Y. Tashiro, H. Aoki, T. Suzuki, K. Tamura, H. Kaya, H. Nishii, and T. Isoda, J. Ceram. Soc. Jpn., 98, 104 (1990).
20. M. Narisawa, M. Shimoda, K. Okamura, M. Sugimoto, and T. Seguchi, Bull. Chem. Soc. Jpn., 68, 1098 (1995).
21. D. Bahloul, M. Pereira, P. Goursat, N.S.C.K. Yive, and R.J.P. Corriou, J. Am. Ceram. Soc., 76 1156 (1993).
22. A higher number of scans were needed for Nls detection
23. D.G.J. Sutherland, M. Kasrai, G.M. Bancroft, Z.F. Liu, and K.H. Tan, Phys. Rev. B: Condens. Matter, 48, 14989 (1993).
24. D. Bahloul, M. Pereira, and C. Gerardin, J. Mater. Chem., 109, 7 (1997).
25. B.R. Zhang, Z. Yu, G.J. Collins, T. Hwang, and W.H. Ritchie, J. Va. Sci. Technol. A., 7, 176 (1989).
26. C. Gerardin, F. Taulelle, and D. Bahloul, J. Mater. Chem., 7, 117 (1997).
27. J. Bill, J. Seitz, G. Thurn, J. Durr, J. Canel, B.Z. Janos, A. Jalowiecki, D. Sauter, S. Schempp, H.P. Lamparter, J. Mayer, and F. Aldinger, Phys. Stat. Sol. A., 166, 269 (1998).
28. M. Henry, C. Geradin, and F. Taulelle, Mater. Res. Soc. Symp. Proc., 271, 243 (1992).
29. C. Geradin, PhD dissertation, ETS-Nantes, (1991).
30. J. Kleebe, Phys. Stat. Sol. A., 166, 297 (1998).