Evaluation of the diffusion barrier continuity on porous low-k films using positronium time of flight spectroscopy

Physical Review B - Condensed Matter and Materials Physics

Volumn 72, Issue 19, 2005, Pages

  Tanaka, H K M ^a,b   Kurihara, T ^b   Mills Jr , A P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b INSTITUTE OF MATERIALS STRUCTURE SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 29744447888     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.72.193408     Document Type: Article

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