Fabrication of free-space MOEM component by CMOS process

Tamkang Journal of Science and Engineering

Volumn 7, Issue 2, 2004, Pages 73-76

  Cheng, Ying Chou ^a   Lee, Chi Yuan ^a   Dai, Ching Liang ^b   Chen, Wen Jong ^a   Chang, Pei Zen ^c   Chen, Ping Hei ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^c NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

CMOS MEMS; Foundry Service; MEMS

Indexed keywords

ATOMIC FORCE MICROSCOPY; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; COMPUTER SOFTWARE; FOUNDRY PRACTICE; INTERFEROMETERS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; REACTIVE ION ETCHING;

ELECTROSTATIC ACTUATION; FOUNDRY SERVICES; MICRO-OPTICAL-ELECTRO-MECHANICAL SYSTEMS (MOEMS); MULTIPLEXERS; ON-CHIP CONTROL CIRCUITS;

MICROOPTICS;

EID: 2942739180     PISSN: 15606686     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (4)

1. Giles, C. R., Aksyuk, V., Barber, B., Ruel, R., Stulz, L. and Bishop, D., "A Silicon MEMS Optical Switch Attenuator and Its Use in Light-wave Subsystems," Selected Topics in Quantum Electronics, IEEE Journal on. Vol. 5, pp. 18-25 (1999).
2. Lin, L. Y. and Goldstein, E. L., "MEMS for Free-Space Optical Switching," LEOS '99, IEEE Lasers and Electro-Optics Society 1999 12th Annual Meeting on, Vol. 2. pp. 483-484 (1999).
3. Helin, P., Mita, M. and Fujita, H., "Self-aligned Mirror and V-grooves in Freespace Micromachined Optical Switches." Electronics Letters, Vol. 36, pp. 563-564 (2000).
4. Shen, G., Cheng, T. H., Bose, S. K., Lu, C. and Chai, T. Y., "Architectural Design for Multistage 2-D MEMS Optical Switches," Journal of Lightwave Technology, pp. 1-10 (2002).