Image formation by use of the geometrical theory of diffraction

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 21, Issue 6, 2004, Pages 959-967

  Khoh, Andrew ^a   Samudra, Ganesh S ^a   Wu, Yihong ^a   Milster, Tom ^b   Choi, Byoung Il ^c  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b UNIVERSITY OF ARIZONA   (United States)

^c CHARTERED SEMICONDUCTOR MANUFACTURING LTD   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION; FOURIER TRANSFORMS; GEOMETRICAL OPTICS; IMAGE RECONSTRUCTION; LIGHT REFLECTION; MASKS; MATHEMATICAL MODELS; ONE DIMENSIONAL; PHOTOLITHOGRAPHY; RAY TRACING; TWO DIMENSIONAL; VECTORS;

EDGE BASED IMAGE MODELS; FRAUNHOFFER REGION; HOPKINS IMAGE MODEL; HUYGENS-FRESNEL PRINCIPLE; OPTICAL PROXIMITY CORRECTION; VERTEX BASED IMAGE MODELS;

IMAGING TECHNIQUES;

EID: 2942706012     PISSN: 10847529     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOSAA.21.000959     Document Type: Article

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