Thickness determination of ultra-thin films on Si substrates by EPMA

Microchimica Acta

Volumn 145, Issue 1-4, 2004, Pages 13-17

  Campos, Christiani S ^a,b   Vasconcellos, Marcos A Z ^a   Llovet, Xavier ^b   Salvat, Francesc ^b  

^a FEDERAL UNIVERSITY OF RIO GRANDE DO SUL   (Brazil)

^b UNIVERSITY OF BARCELONA   (Spain)

Author keywords

EPMA; Monte Carlo simulation; Thickness determination

Indexed keywords

GERMANIUM; GOLD; SILICON; SILICON DIOXIDE; SILVER; TIN;

CALCULATION; CONFERENCE PAPER; ELECTRON PROBE MICROANALYSIS; FILM; INTERFEROMETRY; IONIZATION; MONTE CARLO METHOD; SPECTROMETRY; THICKNESS;

EID: 2942696744     PISSN: 00263672     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00604-003-0120-3     Document Type: Conference Paper

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