A systematic database of thin-film measurements by EPMA: Part I - Aluminum films

X-Ray Spectrometry

Volumn 29, Issue 3, 2000, Pages 212-238

  Bastin, G F ^a   Heijligers, H J M ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ELECTRON PROBE MICROANALYSIS; METALLIC FILMS; SOFTWARE TESTING; SUBSTRATES; THIN FILMS;

ACCELERATING VOLTAGES; ALUMINUM FILM; DIFFERENT SUBSTRATES; ELECTRON PROBE MICROANALYSES; ELECTRON-PROBE MICROANALYSIS; GAUSSIANS; NOMINAL THICKNESS; THIN FILM ANALYSIS; THIN FILMS MEASUREMENTS; VARIOUS SUBSTRATES;

DATABASE SYSTEMS;

EID: 0034402827     PISSN: 00498246     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1097-4539(200005/06)29:3<212::AID-XRS422>3.0.CO;2-K     Document Type: Article

References (23)

1. Packwood RH, Brown JD. X-Ray Spectrom. 1981; 10: 138.
2. Bastin GF, van Loo FJJ, Heijligers HJM. X-Ray Spectrom. 1984; 13: 91.
3. Bastin GF, Heijligers HJM. In Electron Probe Quantitaten, Workshop at the National Bureau of Standards, Gaithersburg, Maryland, 1988, Heinrich KFJ, Newbury DE (eds). Plenum Press: New York, 1991; 145-161.
4. Pouchou JL, Pichoir F. Rech. Aérospat. 1984; 3: 13.
5. Pouchou JL, Pichoir F, Boivin D. (a) Proceedings of 12th ICXOM 28 Aug-1 Sep 1989, Cracow, Poland. Jasienska S, Maksymowicz LJ (eds). Cracow Academy of Mining and Metallurgy, 1990; 52;
6. (b) Further Improvements in Quantitation Procedures for X-ray Microanalysis, ONERA Report TP 157, 1989.
7. Bastin GF, Dijkstra JM, Heijligers HJM. X-Ray Spectrom. 1998; 27: 3.
8. Merlet C. Inst. Phys. Conf. Ser. 1992; No. 130; 123.
9. Bastin GF, Heijligers HJM. Scanning 1990; 12: 225.
10. Pouchou JL, Pichoir F. Rech. Aérospat. 1984; 5: 349.
11. Packwood RH, Milliken KS. A general equation for predicting x-ray intensitites from stratified samples in the electron microprobe, CANMET Report No. PMRL/85-25 (TR), May 1985.
12. August H-J, Wernisch J. Scanning 1987; 9: 145.
13. Hunger H-J. Scanning 1988; 10: 65.
14. Waldo RA. In Microbeam Analysis, Newbury DE (ed). San Francisco Press: San Francisco, 1988; 310-314.
15. Willich P, Obertop D. Surf. Interface Anal. 1988; 13: 20.
16. Willich P, Obertop D. J. Phys. Colloque 1989; C-5: 285.
17. Kyser DF, Murata K. In Proceedings of a Workshop on the Use of Monte Carlo Calculations in Electron Probe Microanalysis and Scanning Electron Microscopy. Heinrich KFJ, Newbury DE, Yakowitz H (eds). NBS Special Publication No. 460. National Bureau of Standards: Washington, DC, 1976; 129-138.
18. Ammann N. Thesis MS, R. W. T. H. Aachen, 1989.
19. Bastin GF, Heijligers HJM, Dijkstra JM. In Proceedings of the Xllth International Congress for Electron Microscopy, Seattle (Washington, USA), August 1990, Peachey LD, Williams DB (eds). San Francisco Press: San Francisco, 1990; 216.
20. Bastin GF, Dijkstra JM, Heijligers HJM. In Proceedings of the 50th Annual Meeting of the Electron Microscopy Society of America/27th Annual Meeting of the Microbeam Analysis Society/19th Annual Meeting of the Microscopical Society of Canada, Baily GW, Bentley J, Small JA (eds). San Francisco Press: San Francisco, 1992; 1648.
21. Bastin GF, Dijkstra JM, Heijligers HJM, Klepper D. Microbeam Anal. 1993; 2: 29-43.
22. Pouchou JL, Pichoir F. In Proceedings of the 11th International Congress on X-Ray Optics and Microanalysis, Brown JD, Packwood RH (eds). Graphic Services, UWO: London, Canada, 1986; 249.
23. Waldo RA. In Microbeam Analysis, Howitt DE (ed). ban Francisco Press: San Francisco, 1991; 45-53.