The Rossendorf 3 MV tandetron: A new generation of high-energy implanters

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 382, Issue 1-2, 1996, Pages 357-360

  Friedrich, M ^a   Burger W ^a   Henke, D ^a   Turuc, S ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAMS; ION IMPLANTATION; ION SOURCES; IONS; SURFACE TREATMENT;

MATERIALS MODIFICATION; TANDETRON;

PARTICLE ACCELERATORS;

EID: 0030283430     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-9002(96)00393-2     Document Type: Article

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