Classification of palladium nucleation processes based on nucleus size distribution

Journal of the Electrochemical Society

Volumn 151, Issue 6, 2004, Pages

  Lau, P P ^a,b   Wong, C C ^a   Chan, L ^b   See, A ^b   Law, S B ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b CHARTERED SEMICONDUCTOR MANUFACTURING LTD   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROLESS (EL) CU DEPOSITION; NUCLEUS SIZE DISTRIBUTION; ROOT MEAN SQUARE (RMS) ROUGHNESS; SEMI-INTERQUARTILE RANGE;

ATOMIC FORCE MICROSCOPY; CATALYSIS; CHEMICAL VAPOR DEPOSITION; NUCLEATION; ORGANIC ACIDS; POLYETHYLENE GLYCOLS; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS;

PALLADIUM;

EID: 2942672897     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1738681     Document Type: Article

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