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Volumn 784, Issue , 2003, Pages 301-306
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TEM and electrical analysis of sputtered barium strontium titanate (BST) thin films on flexible copper substrates
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Author keywords
[No Author keywords available]
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Indexed keywords
ANTENNA ARRAYS;
ATOMIC FORCE MICROSCOPY;
COPPER;
MAGNETRON SPUTTERING;
OXIDATION;
THIN FILMS;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY DIFFRACTION;
CHARGE STORAGE;
FILM THICKNESS;
HIGH TEMPERATURE ANNEALS;
POST DEPOSITION;
BARIUM COMPOUNDS;
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EID: 2942650909
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-784-c5.3 Document Type: Conference Paper |
Times cited : (12)
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References (16)
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