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Volumn 5379, Issue , 2004, Pages 39-46

Manufacturability of the X Architecture at the 90-nanometer technology node

Author keywords

[No Author keywords available]

Indexed keywords

CHIP VALIDATION; CRITICAL DIMENSIONS; METAL PITCHES; WAFER PROCESSING;

EID: 2942644477     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.536027     Document Type: Conference Paper
Times cited : (2)

References (12)
  • 2
    • 0036116744 scopus 로고    scopus 로고
    • A diagonal-interconnect architecture and its application to RISC core design
    • Session 12, TD: Digital Directions, paper 12.8
    • Mutsunori Igarashi, Takashi Mitsuhashi, Andy Le, Shardul Kazi, Yang-Trun Lin, Aki Fujimura, Steve Teig, "A Diagonal-Interconnect Architecture and Its Application to RISC Core Design," ISSCC, Session 12, TD: Digital Directions, paper 12.8, 2002.
    • (2002) ISSCC
    • Igarashi, M.1    Mitsuhashi, T.2    Le, A.3    Kazi, S.4    Lin, Y.-T.5    Fujimura, A.6    Teig, S.7
  • 3
    • 84862371246 scopus 로고    scopus 로고
    • X Initiative, http://www.xinitiative.org.
  • 5
    • 0141835020 scopus 로고    scopus 로고
    • Optimizing reticle inspection for the X Architecture
    • [5038-31]
    • Chris Aquino, "Optimizing reticle inspection for the X Architecture," Proceedings of SPIE, Vol. #5038 [5038-31], pp. 303-314, 2003.
    • (2003) Proceedings of SPIE , vol.5038 , pp. 303-314
    • Aquino, C.1
  • 6
    • 0242441453 scopus 로고    scopus 로고
    • Design-to-process integration: Optimizing 130 nanometer X Architecture manufacturing
    • [5042-21]
    • Bob Dean, Vinod Malhota, Nahid King, Michael Sanie, Susan MacDonald, Jim Jordan, Shigeru Hirukawa, "Design-to-process integration: optimizing 130 nanometer X Architecture manufacturing," Proceedings of SPIE, Vol. #5042 [5042-21], pp. 197-204, 2003.
    • (2003) Proceedings of SPIE , vol.5042 , pp. 197-204
    • Dean, B.1    Malhota, V.2    King, N.3    Sanie, M.4    MacDonald, S.5    Jordan, J.6    Hirukawa, S.7
  • 9
    • 0037330581 scopus 로고    scopus 로고
    • Prospects and challenges of optical RET
    • February
    • Michael Fritze, Brian Tyrrell, "Prospects and challenges of optical RET," Solid State Technology, pp. 61-66, February 2003.
    • (2003) Solid State Technology , pp. 61-66
    • Fritze, M.1    Tyrrell, B.2
  • 11
    • 2942672347 scopus 로고    scopus 로고
    • Resolution enhancement techniques for the 90-nm technology node and beyond
    • July 11
    • David Bergeron, Michael Smayling, Hong Du, Takeaki Ebihara, Toshihiro Oga, Tracy Weed, "Resolution Enhancement Techniques for the 90-nm Technology Node and Beyond," Future Fab Intl., Volume 15, July 11, 2003.
    • (2003) Future Fab Intl. , vol.15
    • Bergeron, D.1    Smayling, M.2    Du, H.3    Ebihara, T.4    Oga, T.5    Weed, T.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.